noun
Meaning 1
The organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.
Definition source: English Wiktionary via Wiktextract
Usage: uncountable
No example sentence was provided for this meaning.
Meaning relationships
Synonyms: none provided
Antonyms: none provided